Price list

Facility and equipment usage fees are determined by the regulations of each implementing department. The fees below are broadly divided into (i) Ministry of Education, Culture, Sports, Science and Technology’s ARIM project (equipment usage + data provision, equipment usage only), and (ii) Tohoku University’s independent project, which is not disclosed.

■Microstructural analysis (Analysis/Measurement field)
Materials Analysis Research Core, Institute for Materials Research/Tohoku Advanced Microscope Center/Graduate School of Science

■Microprocessing (processing/device process field)
Prototype coin laundry (MEMS)

Microstructure analysis (Metallic Materials Research Institute Materials Analysis Research Core)
Technical support fee A(Public: 3,300 yen/hour; Private: 8,690 yen/hour)
Technical support fee B (Public: 6,490 yen/hour; Private: 12,980 yen/hour)
For use outside of business hours (after 17:15 on weekdays, and on weekends and holidays), 1.25 times the above fee will be applied to both support fees A and B.
Specimen Preparation Room Usage Fee(Public data provided: 880 yen/4 hours; Publicly not provided data: 1,408 yen/4 hours; Private: 2,640 yen/4 hours)
FIB Sample grid(Cu: 550 yen/1 piece) (Si: 3,124 yen/1 piece) (Mo: 2,970 yen/1 piece) (Ti: 3,080 yen/1 piece) (Ni: 1,980 yen/1 piece)
Aperture usage fee for FIB Amber-X(600 um: 143 yen/1H) (800 um: 352 yen/1 hour)
Usage fee [yen/1 hour]

Equipment NameModelARIM Equipment IDARIM Project
(Equipment Use + Data Sharing)
ARIM Project
(Equipment Use Only)
Non-public Research
Ultra-High Resolution
Transmission Electron
Microscope
JEM-ARM200F WCorr.TU-5044,5107,21621,340
Ultra-High Resolution
Transmission Electron
Microscope
JEM-ARM200F STEMCorr.TU-5224,5107,21621,340
Analytical Electron
Microscope
EM-002BTU-5163,3005,2806,600
Transmission Electron
Microscope
JEM-2000EXIITU-5172,2003,5204,400
Analytical Transmission
Electron Microscope
JEM-2100PlusTU-5203,5205,6326,270
Focused Ion Beam
System
Quanta 3DTU-5073,3005,2806,930
Focused Ion Beam
System
Versa 3DTU-5085,6108,97611,000
Focused Ion Beam
System
Technical Support
Proxy Rate
4,4557,1288,965
Plasma Focused Ion
Beam System
TESCAN Amber-XTU-5214,1806,68842,240
Thin-Film Cross-Section
Sample Preparation
System
EM-09100ISTU-5182,2003,5204,070
Ion Milling SystemPIPS IITU-5111,2101,9362,860
Ion Milling SystemModel1010TU-5124407041,650
Thermal Analysis SystemThermo plus EVO IITU-5147701,2321,760
High-Power Automated
Horizontal Multi-Purpose
X-ray Diffractometer
SmartLab 9SWTU-5151,3202,1124,400

*Usage fees are subject to the usage regulations of the Analysis Research Core.
*Cannot be used alone by beginners. Please request observation on your behalf or witness observation.
*The fee for the thin film cross-section sample preparation device is based on the case that you bring in a pretreated (preliminarily processed) sample and only perform ion polishing in our laboratory.
*The displayed price includes tax. [Updated 2026/1/22]

The price list isClick here.

Details regarding data registration are provided on the ARIM Business Group’s website “About data registration” page.

Microstructural analysis (Tohoku Advanced Microscopy Center)
Technical support fee A (3,520 yen/hour) *Same fee for public and non-public
Technical support fee B (6,600 yen/hour) *Same fee for public and private
Usage fee [yen/day (8 hours)]
Equipment NameModelARIM Equipment IDARIM Project
(Equipment Use + Data Sharing)
ARIM Project
(Equipment Use Only)
Non-public Research
Double-Corrector
Transmission Electron
Microscope
FEI-Titan G2-cubedTU-502102,960164,740169,840
Probe-Corrector
Transmission Electron
Microscope
FEI-Titan G2-cubedTU-503102,960164,740169,840
Ion Milling SystemIonMill 101038,72043,12043,120
Specimen Preparation
Room
2,6402,6402,640

*Usage fees are subject to Tohoku Advanced Microscope Center usage regulations. The usage unit is 8 hours (per day).
*Technical support and analysis support are subject to quotation and consultation on a case-by-case basis.
*The displayed price includes tax. [Updated 2025/10/1]

The price list is here:

Details regarding data registration are provided on the ARIM Business Group’s website “About data registration” page.

Microstructural analysis (Group Molecule Analysis Research Center, Graduate School of Science)
Usage fee [yen/hour]
Equipment NameModelARIM Equipment IDARIM Project
(Equipment Use + Data Sharing)
ARIM Project
(Equipment Use Only)
Non-public Research
Nuclear Magnetic
Resonance Spectrometer
800MHz NMR
JNM-ECA 800
5,2005,20032,100
Inductively Coupled
Plasma Optical Emission
Spectrometer
ICPE-90003,2003,2004,600

*Usage is only for technical agency.
*Consumables must be provided by the user.
*Prices shown are excluding tax.

Microfabrication(MEMS prototype coin laundry)
For ARIM business use ■Technical support fee 3,300 yen/hour ■Facility usage fee 600 yen/hour (430 yen/hour on campus)
For private use ■Technical support fee 6,514 yen/hour ■Facility usage fee 600 yen/hour (430 yen/hour on campus)
Equipment list and price list download (Click here) *Updated on May 14, 2025
*The price list changes every year. Please check the prototype laundromat web page for the latest version.

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