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Facility and equipment usage fees are determined by the regulations of each implementing department. The fees below are broadly divided into (i) Ministry of Education, Culture, Sports, Science and Technology’s ARIM project (equipment usage + data provision, equipment usage only), and (ii) Tohoku University’s independent project, which is not disclosed.
■Microstructural analysis (Analysis/Measurement field)
Materials Analysis Research Core, Institute for Materials Research/Tohoku Advanced Microscope Center/Graduate School of Science
■Microprocessing (processing/device process field)
Prototype coin laundry (MEMS)
| Microstructure analysis (Metallic Materials Research Institute Materials Analysis Research Core) |
|---|
| ■Technical support fee A(Public: 3,300 yen/hour; Private: 8,690 yen/hour) ■Technical support fee B (Public: 6,490 yen/hour; Private: 12,980 yen/hour) For use outside of business hours (after 17:15 on weekdays, and on weekends and holidays), 1.25 times the above fee will be applied to both support fees A and B. ■Specimen Preparation Room Usage Fee(Public data provided: 880 yen/4 hours; Publicly not provided data: 1,408 yen/4 hours; Private: 2,640 yen/4 hours) ■FIB Sample grid(Cu: 550 yen/1 piece) (Si: 3,124 yen/1 piece) (Mo: 2,970 yen/1 piece) (Ti: 3,080 yen/1 piece) (Ni: 1,980 yen/1 piece) ■Aperture usage fee for FIB Amber-X(600 um: 143 yen/1H) (800 um: 352 yen/1 hour) |
| Usage fee [yen/1 hour] |
| 装置名 〈 *〉はARIM事業装置ID | ARIM事業 (設備利用+データ提供) | ARIM事業 (設備利用) | 成果非公開 |
|---|---|---|---|
| 超高分解能透過電子顕微鏡 (JEM-ARM200F WCorr.) 〈TU-504*〉 | 4,510 | 7,216 | 21,340 |
| 超高分解能透過電子顕微鏡 (JEM-ARM200F STEMCorr.)〈TU-522*〉 | 4,510 | 7,216 | 21,340 |
| 分析電子顕微鏡 (EM-002B) 〈TU-516*〉 | 3,300 | 5,280 | 6,600 |
| 透過電子顕微鏡 (JEM-2000EXII)〈TU-517*〉 | 2,200 | 3,520 | 4,400 |
| 分析透過電子顕微鏡(JEM-2100Plus)〈TU-520*〉 | 3,520 | 5,632 | 6,270 |
| 集束イオンビーム加工装置 (Quanta 3D)〈TU-507*〉 | 3,300 | 5,280 | 6,930 |
| 集束イオンビーム加工装置 (Versa 3D)〈TU-508*〉 | 5,610 | 8,976 | 11,000 |
| 集束イオンビーム加工装置 技術代行適応料金 | 4,455 | 7,128 | 8,965 |
| プラズマ集束イオンビーム加工装置 (TESCAN Amber-X) 〈TU-521*〉 | 4,180 | 6,688 | 42,240 |
| 薄膜断面試料作製装置 (EM-09100IS)〈TU-518*〉 | 2,200 | 3,520 | 4,070 |
| イオンミリング装置 (PIPSⅡ)〈TU-511*〉 | 1,210 | 1,936 | 2,860 |
| イオンミリング装置 (Model1010)〈TU-512*〉 | 440 | 704 | 1,650 |
| 熱分析装置 (Thermo plus EVO Ⅱ) 〈TU-514*〉 | 770 | 1,232 | 1,760 |
| 高出力全自動水平型多目的X線回折装置 (SmartLab 9SW)〈TU-515*〉 | 1,320 | 2,112 | 4,400 |
*Usage fees are subject to the usage regulations of the Analysis Research Core.
*Cannot be used alone by beginners. Please request observation on your behalf or witness observation.
*The fee for the thin film cross-section sample preparation device is based on the case that you bring in a pretreated (preliminarily processed) sample and only perform ion polishing in our laboratory.
*The displayed price includes tax. [Updated 2026/1/22]
The price list is
Details regarding data registration are provided on the ARIM Business Group’s website “About data registration” page.
| Microstructural analysis (Tohoku Advanced Microscopy Center) |
|---|
| ■Technical support fee A (3,520 yen/hour) *Same fee for public and non-public ■ Technical support fee B (6,600 yen/hour) *Same fee for public and private |
| Usage fee [yen/day (8 hours)] |
| 装置名 〈 *〉はARIM事業装置ID | ARIM事業 (設備利用+データ提供) | ARIM事業 (設備利用) | 成果非公開 |
|---|---|---|---|
| ダブルコレクター透過電顕(FEI-Titan G2-cubed)〈TU-502*〉 | 102,960 | 164,740 | 169,840 |
| プローブコレクター透過電顕(FEI-Titan G2-cubed)〈TU-503*〉 | 102,960 | 164,740 | 169,840 |
| イオンミリング装置(IonMill1010) | 38,720 | 43,120 | 43,120 |
| 試料作成準備室 | 2,640 | 2,640 | 2,640 |
*Usage fees are subject to Tohoku Advanced Microscope Center usage regulations. The usage unit is 8 hours (per day).
*Technical support and analysis support are subject to quotation and consultation on a case-by-case basis.
*The displayed price includes tax. [Updated 2025/10/1]
The price list is here:
Details regarding data registration are provided on the ARIM Business Group’s website “About data registration” page.
| Microstructural analysis (Group Molecule Analysis Research Center, Graduate School of Science) |
|---|
| Usage fee [yen/hour] |
| 装置 | ARIM事業 (設備利用+データ提供) | ARIM事業 (設備利用) | 成果非公開 |
|---|---|---|---|
| 核磁気共鳴装置(800MHz NMR JNM-ECA 800) | 5,200 | 5,200 | 32,100 |
| ICP発光分光分析装置(ICPE-9000) | 3,200 | 3,200 | 4,600 |
*Usage is only for technical agency.
*Consumables must be provided by the user.
*Prices shown are excluding tax.
| Microfabrication(MEMS prototype coin laundry) |
|---|
| For ARIM business use ■Technical support fee 3,300 yen/hour ■Facility usage fee 600 yen/hour (430 yen/hour on campus) For private use ■Technical support fee 6,514 yen/hour ■Facility usage fee 600 yen/hour (430 yen/hour on campus) Equipment list and price list download (Click here) *Updated on May 14, 2025 *The price list changes every year. Please check the prototype laundromat web page for the latest version. |
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