Notice: This page is an AI-generated English translation and may contain errors. The Japanese page is the authoritative version.
In the field of microfabrication, we will be offering equipment for photolithography, etching, thin film deposition, bonding, measurement, etc., along with operating training, as well as providing technical consultation on device structures and the entire process. The test will be conducted at a prototype laundromat within the Junichi Nishizawa Memorial Research Center at Tohoku University. In our clean room, which is approximately 1,800 square meters in size, we have a process line that can handle everything from small pieces to up to 8-inch wafers.
Support details
There are three types of support in the microfabrication field:
- Equipment use: The basic form of support is the use of equipment by the person himself/herself.
- Technical agency: If it is difficult to use equipment or outsource to an outside company, our staff will undertake processing to the extent possible.
- Technical assistance: Provide training on equipment used for the first time or after a long period of time since last use. We also provide technical consultation and joint research regarding device structures and overall processes.
- Technical consultation: Based on the support results, we will provide technical consultation and joint research regarding device structure and the entire process.
As for semiconductor circuit technology support, we provide the following support.
- Support for learning integrated circuit design techniques and learning how to use EDA tools.
- Support for prototyping of integrated circuits using foundries.
Assistance equipment
- Equipment list (Ministry of Education, Culture, Sports, Science and Technology ARIM shared equipment search)
- Download equipment list and price list (Go to prototype coin laundry (equipment) page)
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